Pentakis(dimethylamino)tantalum (Ta(NC2H6)5)

Pentakis(dimethylamino)tantalum (PDMAT) is most widely used as a tantalum source for TaN barrier

Diiodosilane （H2I2Si）

Diiodosilane, as a silicon-based precursor material, can rapidly form a uniform and dense silicon nitride

Trisilane is a chemical substance with a molecular structure consisting of three silicon atoms and

Trimethylsilylamine (chemical formula N(SiH3)3, referred to as TSA), is a colorless, easily hydrolyzed liquid with

Trimethylantimony, with the molecular formula Sb (CH3) 3, is a colorless and transparent liquid

Titanium tetrachloride is an inorganic compound with the chemical formula

Tetramethylsilane is chemically represented as C4H12Si and is a colorless and transparent organic liquid. The

Tertiarybutylphosphine (TBP)

CAS:2501-94-2

Melting point: 4℃

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Octamethylcyclotetrasiloxane is a colorless, transparent or milky white liquid with flammability and no